2024年4月11日发(作者：)

tpd生产工艺流程

英文回答：

Thin-panel Display (TPD) Manufacturing Process.

Substrate Preparation:

Glass substrate cleaning.

Sputtering of transparent conductive oxide (TCO) layer.

Alignment Film Formation:

Application of polyimide (PI) film.

UV exposure and development to create alignment

patterns.

Pixel Electrode Formation:

Deposition of pixel electrodes (e.g., indium tin oxide)。

Patterning by photolithography and etching.

Color Filter Deposition:

Deposition of red, green, and blue color filters.

Patterning by photolithography and etching.

Black Matrix Formation:

Deposition of black matrix material around pixels.

Patterning by photolithography and etching.

Thin-Film Transistor (TFT) Fabrication:

Deposition of semiconductor materials (e.g., amorphous

silicon)。

Patterning by photolithography and etching.