2024年4月23日发(作者：)

专利内容由知识产权出版社提供

专利名称：Wafer-level tester with magnet to test

latching micro-magnetic switches

发明人：Cheng Ping Wei,Jun Shen

申请号：US10823786

申请日：20040414

公开号：US07005876B2

公开日：20060228

专利附图：

摘要：A method, system, and apparatus for testing one or more micro-magnetic

switches on a wafer is described. A magnet is positioned adjacent to a first switch on the

wafer. A probe card is positioned adjacent to the first switch. The probe card mounts a

first set of probes and a second set of probes. The first set of probes interface with

contact areas of a coil associated with the first switch. The second set of probes interface

with conductors on the wafer associated with the cantilever of the first switch. A current

source is electrically coupled to the first set of probes. The current source activates the

coil of the first switch using the first set of probes to switch the cantilever from a first

state to a second state. A switch state monitor is electrically coupled to the second set

of probes. The switch state monitor determines whether the cantilever of the first switch

is in the first state prior to the current source activating the coil of the first switch. The

switch state monitor also determines whether the cantilever is in the second state after

the current source activates the coil of the first switch. A stepper motor moves the wafer

relative to the magnet and probe card to test further switches on the wafer. An inker

marks a switch on the wafer that has been determined by the switch state monitor to be

defective.

申请人：Cheng Ping Wei,Jun Shen

地址：Gilbert AZ US,Phoenix AZ US

国籍：US,US

代理机构：Sterne, Kessler, Goldstein & Fox P.L.L.C.

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