2024年4月11日发(作者：)

接触式光刻系统ma6标准操作流程

英文回答：

The standard operating procedure for the MA6 contact

lithography system involves several steps to ensure

accurate and precise patterning of a substrate.

1. Preparing the substrate: Before starting the

lithography process, it is important to clean the substrate

to remove any contaminants or particles that may interfere

with the patterning. This can be done using a cleaning

solution and a lint-free cloth.

2. Aligning the mask: The mask, which contains the

desired pattern, needs to be aligned with the substrate.

This can be done using alignment marks on both the mask and

the substrate. The mask is placed on the mask stage and

aligned using the microscope.

3. Loading the substrate: The substrate is loaded onto

the chuck, which holds it in place during the exposure. The

chuck is then inserted into the system.

4. Setting exposure parameters: The exposure parameters,

such as the exposure time and intensity, need to be set

according to the requirements of the patterning process.

This can be done using the control panel of the MA6 system.

5. Exposing the substrate: Once the exposure parameters

are set, the exposure process can be initiated. The mask

stage moves into position, and the UV light source is

turned on to expose the substrate. The exposure time is

controlled by the system.

6. Developing the substrate: After the exposure, the

substrate needs to be developed to remove the unexposed

resist. This can be done using a developer solution, which

selectively removes the unexposed resist while leaving the

exposed resist intact.

7. Inspecting the pattern: Once the development process

is complete, the substrate can be inspected to ensure that

the desired pattern has been successfully transferred. This

can be done using a microscope or other inspection tools.

8. Post-processing: Depending on the specific

requirements of the patterning process, additional post-

processing steps may be necessary. This can include steps

such as etching, deposition, or annealing.

中文回答：

MA6接触式光刻系统的标准操作流程包括多个步骤，以确保对

基板进行准确和精确的图案化处理。

1. 准备基板，在开始光刻过程之前，清洁基板以去除可能干扰

图案化的污染物或颗粒非常重要。可以使用清洁溶液和无纺布来进

行清洁。

2. 对准掩模，掩模中包含所需的图案，需要与基板对准。可以

使用掩模和基板上的对准标记来进行对准。将掩模放置在掩模台上，

并使用显微镜进行对准。

3. 装载基板，将基板装载到夹具上，在曝光过程中保持基板的

位置稳定。然后将夹具插入系统中。

4. 设置曝光参数，需要根据图案化过程的要求设置曝光参数，

如曝光时间和强度。可以使用MA6系统的控制面板进行设置。

5. 曝光基板，一旦设置好曝光参数，就可以开始曝光过程。掩

模台移动到位，UV光源打开以曝光基板。曝光时间由系统控制。

6. 显影基板，曝光后，需要显影基板以去除未曝光的光刻胶。

可以使用显影液进行显影，显影液选择性地去除未曝光的光刻胶，

同时保留曝光的光刻胶。

7. 检查图案，完成显影过程后，可以检查基板以确保成功转移

所需的图案。可以使用显微镜或其他检查工具进行检查。

8. 后处理，根据图案化过程的特定要求，可能需要进行其他后

处理步骤。这可以包括蚀刻、沉积或退火等步骤。

举例说明，假设我正在使用MA6系统进行半导体芯片的光刻。

首先，我会准备好干净的基板，确保其表面没有任何杂质。然后，

我会将掩模放置在掩模台上，并使用显微镜对准掩模和基板上的对

准标记。接下来，我会将基板装载到夹具上，并将夹具插入MA6系

统中。然后，我会根据光刻要求设置曝光参数，例如曝光时间和强

度。一旦设置好曝光参数，我就可以开始曝光过程。掩模台移动到

位，UV光源打开，曝光基板。曝光完成后，我会使用显影液对基板

进行显影，去除未曝光的光刻胶。最后，我会检查基板上的图案，

确保它们被成功转移。如果需要，我还可以进行其他后处理步骤，

如蚀刻或沉积。

以上就是MA6接触式光刻系统的标准操作流程。